| Course label : | Micro-nano Fabrication Techniques |
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| Teaching departement : | EEA / Electrotechnics - Electronics - Control Systems |
| Teaching manager : | |
| Education language : | |
| Potential ects : | 0 |
| Results grid : | |
| Code and label (hp) : | MR_ETECH_S3_MFT - Micro-nano Fabrication Techniq |
Education team
Teachers :
External contributors (business, research, secondary education): various temporary teachers
Summary
Our daily life is filled with a large quantity of microsystems in most of the objects we use: electronic components, sensors, loudspeakers, filters, imagers,ￜ are indeed integrated into smartphones, cars, computers,ￜ that we use on a daily basis. Innovation in this area is very rapid, both in terms of miniaturization and the complexity of technologies. Being a player in the technologies of tomorrow presupposes knowing the technologies of today as well as their manufacturing techniques. Two modules provide an understanding of micro-nanotechnologies. With these two modules, the entire micro-system design chain will be studied: from the physical design of a device to its integration, including the definition of its manufacturing process. 1. Micro and nanotechnologies, microfabrication and clean room This module aims to present microsystems as well as their micro-manufacturing techniques. The development of a manufacturing process for a given microsystem must take into account the specifications of each manufacturing technique. A practical work carried out in an educational clean room will allow the implementation of certain processes studied for the realization of a microsystem. 2. Micro and nano systems, on-board electronics, integration and packaging The first objective of this module is to present the physics of micro-nanosystems, an essential point in the design of devices. The second objective concerns the integration of microsystems into their environment: several points must be taken into account, such as the development of the microsystem's control / packaging electronics, the packaging of the chip and integration into various configurations.
Educational goals
Knowing how to understand, use and design a micro-nanosystem. Know the different micro-nano fabrication techniques in order to be able to develop the manufacturing process of a microsystem taking into account the different peculiarities of techniques and technologies.
Sustainable development goals
Knowledge control procedures
Continuous Assessment
Comments: 1. Micro and nanotechnologies, microfabrication and clean room
- Classroom questioning
- Homework report
- Practical work report
2. Micro and nano systems, on-board electronics, integration and packaging
- Classroom questioning
- Case study report
Online resources
- Course materials and exercises - Reference books - Links to online courses or videos - Micro-nano-fabrication Clean Room
Pedagogy
- Lessons: 40 hours - Teaching is organized in seminars, followed by self-study time through provided quizzes, exercises, readings and online videos - Practical work: 8 H - Fabrication of a micro-system in the micro-nano-fabrication Clean Room
Sequencing / learning methods
| Number of hours - Lectures : | 24 |
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| Number of hours - Tutorial : | 16 |
| Number of hours - Practical work : | 8 |
| Number of hours - Seminar : | 0 |
| Number of hours - Half-group seminar : | 0 |
| Number of student hours in TEA (Autonomous learning) : | 0 |
| Number of student hours in TNE (Non-supervised activities) : | 0 |
| Number of hours in CB (Fixed exams) : | 0 |
| Number of student hours in PER (Personal work) : | 0 |
| Number of hours - Projects : | 0 |
Prerequisites
Solid state physics (Basics)
Maximum number of registrants
Remarks
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