| Libellé du cours : | Micro-nano Fabrication Techniques |
|---|---|
| Département d'enseignement : | EEA / Electronique Electrotechnique Automatique |
| Responsable d'enseignement : | Monsieur PHILIPPE PERNOD |
| Langue d'enseignement : | |
| Ects potentiels : | 0 |
| Grille des résultats : | |
| Code et libellé (hp) : | MR_ETECH_S3_MFT - Micro-nano Fabrication Techniq |
Equipe pédagogique
Enseignants : Monsieur PHILIPPE PERNOD
Intervenants extérieurs (entreprise, recherche, enseignement secondaire) : divers enseignants vacataires
Résumé
Our daily life is filled with a large quantity of microsystems in most of the objects we use: electronic components, sensors, loudspeakers, filters, imagers,… are indeed integrated into smartphones, cars, computers,… that we use on a daily basis. Innovation in this area is very rapid, both in terms of miniaturization and the complexity of technologies. Being a player in the technologies of tomorrow presupposes knowing the technologies of today as well as their manufacturing techniques. Two modules provide an understanding of micro-nanotechnologies. With these two modules, the entire micro-system design chain will be studied: from the physical design of a device to its integration, including the definition of its manufacturing process. 1. Micro and nanotechnologies, microfabrication and clean room This module aims to present microsystems as well as their micro-manufacturing techniques. The development of a manufacturing process for a given microsystem must take into account the specifications of each manufacturing technique. A practical work carried out in an educational clean room will allow the implementation of certain processes studied for the realization of a microsystem. 2. Micro and nano systems, on-board electronics, integration and packaging The first objective of this module is to present the physics of micro-nanosystems, an essential point in the design of devices. The second objective concerns the integration of microsystems into their environment: several points must be taken into account, such as the development of the microsystem's control / packaging electronics, the packaging of the chip and integration into various configurations.
Objectifs pédagogiques
Knowing how to understand, use and design a micro-nanosystem. Know the different micro-nano fabrication techniques in order to be able to develop the manufacturing process of a microsystem taking into account the different peculiarities of techniques and technologies.
Objectifs de développement durable
Modalités de contrôle de connaissance
Contrôle Continu
Commentaires: 1. Micro and nanotechnologies, microfabrication and clean room
• Classroom questioning
• Homework report
• Practical work report
2. Micro and nano systems, on-board electronics, integration and packaging
• Classroom questioning
• Case study report
Ressources en ligne
- Course materials and exercises - Reference books - Links to online courses or videos - Micro-nano-fabrication Clean Room
Pédagogie
- Lessons: 40 hours - Teaching is organized in seminars, followed by self-study time through provided quizzes, exercises, readings and online videos - Practical work: 8 H - Fabrication of a micro-system in the micro-nano-fabrication Clean Room
Séquencement / modalités d'apprentissage
| Nombre d'heures en CM (Cours Magistraux) : | 24 |
|---|---|
| Nombre d'heures en TD (Travaux Dirigés) : | 16 |
| Nombre d'heures en TP (Travaux Pratiques) : | 8 |
| Nombre d'heures en Séminaire : | 0 |
| Nombre d'heures en Demi-séminaire : | 0 |
| Nombre d'heures élèves en TEA (Travail En Autonomie) : | 0 |
| Nombre d'heures élèves en TNE (Travail Non Encadré) : | 0 |
| Nombre d'heures en CB (Contrôle Bloqué) : | 0 |
| Nombre d'heures élèves en PER (Travail PERsonnel) : | 0 |
| Nombre d'heures en Heures Projets : | 0 |
Pré-requis
Solid state physics (Basics)
Nombre maximum d'inscrits
Remarques
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